x(mm),y(mm),opd(nm)
-5.8646616541e+01,-5.9699248120e+02,4.9732711996e+01
-5.5639097744e+01,-5.9699248120e+02,4.9162493399e+01
-5.2631578947e+01,-5.9699248120e+02,4.8624801957e+01
-4.9624060150e+01,-5.9699248120e+02,4.8119225649e+01
-4.6616541353e+01,-5.9699248120e+02,4.7645376477e+01
-4.3609022556e+01,-5.9699248120e+02,4.7202890273e+01
-4.0601503759e+01,-5.9699248120e+02,4.6791426513e+01
-3.7593984962e+01,-5.9699248120e+02,4.6410668147e+01
-3.4586466165e+01,-5.9699248120e+02,4.6060321440e+01
-3.1578947368e+01,-5.9699248120e+02,4.5740115825e+01
-2.8571428571e+01,-5.9699248120e+02,4.5449803760e+01
-2.5563909774e+01,-5.9699248120e+02,4.5189160610e+01
-2.2556390977e+01,-5.9699248120e+02,4.4957984526e+01
-1.9548872180e+01,-5.9699248120e+02,4.4756096349e+01
-1.6541353383e+01,-5.9699248120e+02,4.4583339511e+01
-1.3533834586e+01,-5.9699248120e+02,4.4439579963e+01
-1.0526315789e+01,-5.9699248120e+02,4.4324706099e+01
-7.5187969925e+00,-5.9699248120e+02,4.4238628704e+01
-4.5112781955e+00,-5.9699248120e+02,4.4181280907e+01
-1.5037593985e+00,-5.9699248120e+02,4.4152618146e+01
1.5037593985e+00,-5.9699248120e+02,4.4152618146e+01
4.5112781955e+00,-5.9699248120e+02,4.4181280907e+01
7.5187969925e+00,-5.9699248120e+02,4.4238628704e+01
1.0526315789e+01,-5.9699248120e+02,4.4324706099e+01
1.3533834586e+01,-5.9699248120e+02,4.4439579963e+01
1.6541353383e+01,-5.9699248120e+02,4.4583339511e+01
1.9548872180e+01,-5.9699248120e+02,4.4756096349e+01
2.2556390977e+01,-5.9699248120e+02,4.4957984526e+01
2.5563909774e+01,-5.9699248120e+02,4.5189160610e+01
2.8571428571e+01,-5.9699248120e+02,4.5449803760e+01
3.1578947368e+01,-5.9699248120e+02,4.5740115825e+01
3.4586466165e+01,-5.9699248120e+02,4.6060321440e+01
3.7593984962e+01,-5.9699248120e+02,4.6410668147e+01
4.0601503759e+01,-5.9699248120e+02,4.6791426513e+01
4.3609022556e+01,-5.9699248120e+02,4.7202890273e+01
4.6616541353e+01,-5.9699248120e+02,4.7645376477e+01
4.9624060150e+01,-5.9699248120e+02,4.8119225649e+01
5.2631578947e+01,-5.9699248120e+02,4.8624801957e+01
5.5639097744e+01,-5.9699248120e+02,4.9162493399e+01
5.8646616541e+01,-5.9699248120e+02,4.9732711996e+01
-8.2706766917e+01,-5.9398496241e+02,4.9432256684e+01
-7.9699248120e+01,-5.9398496241e+02,4.8624801957e+01
-7.6691729323e+01,-5.9398496241e+02,4.7852448570e+01
-7.3684210526e+01,-5.9398496241e+02,4.7114595723e+01
-7.0676691729e+01,-5.9398496241e+02,4.6410668147e+01
-6.7669172932e+01,-5.9398496241e+02,4.5740115825e+01
-6.4661654135e+01,-5.9398496241e+02,4.5102413713e+01
-6.1654135338e+01,-5.9398496241e+02,4.4497061482e+01
-5.8646616541e+01,-5.9398496241e+02,4.3923583261e+01
-5.5639097744e+01,-5.9398496241e+02,4.3381527402e+01
-5.2631578947e+01,-5.9398496241e+02,4.2870466249e+01
-4.9624060150e+01,-5.9398496241e+02,4.2389995922e+01
-4.6616541353e+01,-5.9398496241e+02,4.1939736112e+01
-4.3609022556e+01,-5.9398496241e+02,4.1519329886e+01
-4.0601503759e+01,-5.9398496241e+02,4.1128443503e+01
-3.7593984962e+01,-5.9398496241e+02,4.0766766246e+01
-3.4586466165e+01,-5.9398496241e+02,4.0434010259e+01
-3.1578947368e+01,-5.9398496241e+02,4.0129910400e+01
-2.8571428571e+01,-5.9398496241e+02,3.9854224104e+01
-2.5563909774e+01,-5.9398496241e+02,3.9606731256e+01
-2.2556390977e+01,-5.9398496241e+02,3.9387234080e+01
-1.9548872180e+01,-5.9398496241e+02,3.9195557032e+01
-1.6541353383e+01,-5.9398496241e+02,3.9031546712e+01
-1.3533834586e+01,-5.9398496241e+02,3.8895071782e+01
-1.0526315789e+01,-5.9398496241e+02,3.8786022900e+01
-7.5187969925e+00,-5.9398496241e+02,3.8704312659e+01
-4.5112781955e+00,-5.9398496241e+02,3.8649875544e+01
-1.5037593985e+00,-5.9398496241e+02,3.8622667897e+01
1.5037593985e+00,-5.9398496241e+02,3.8622667897e+01
4.5112781955e+00,-5.9398496241e+02,3.8649875544e+01
7.5187969925e+00,-5.9398496241e+02,3.8704312659e+01
1.0526315789e+01,-5.9398496241e+02,3.8786022900e+01
1.3533834586e+01,-5.9398496241e+02,3.8895071782e+01
1.6541353383e+01,-5.9398496241e+02,3.9031546712e+01
1.9548872180e+01,-5.9398496241e+02,3.9195557032e+01
2.2556390977e+01,-5.9398496241e+02,3.9387234080e+01
2.5563909774e+01,-5.9398496241e+02,3.9606731256e+01
2.8571428571e+01,-5.9398496241e+02,3.9854224104e+01
3.1578947368e+01,-5.9398496241e+02,4.0129910400e+01
3.4586466165e+01,-5.9398496241e+02,4.0434010259e+01
3.7593984962e+01,-5.9398496241e+02,4.0766766246e+01
4.0601503759e+01,-5.9398496241e+02,4.1128443503e+01
4.3609022556e+01,-5.9398496241e+02,4.1519329886e+01
4.6616541353e+01,-5.9398496241e+02,4.1939736112e+01
4.9624060150e+01,-5.9398496241e+02,4.2389995922e+01
5.2631578947e+01,-5.9398496241e+02,4.2870466249e+01
5.5639097744e+01,-5.9398496241e+02,4.3381527402e+01
5.8646616541e+01,-5.9398496241e+02,4.3923583261e+01
6.1654135338e+01,-5.9398496241e+02,4.4497061482e+01
6.4661654135e+01,-5.9398496241e+02,4.5102413713e+01
6.7669172932e+01,-5.9398496241e+02,4.5740115825e+01
7.0676691729e+01,-5.9398496241e+02,4.6410668147e+01
7.3684210526e+01,-5.9398496241e+02,4.7114595723e+01
7.6691729323e+01,-5.9398496241e+02,4.7852448570e+01
7.9699248120e+01,-5.9398496241e+02,4.8624801957e+01
8.2706766917e+01,-5.9398496241e+02,4.9432256684e+01
-1.0075187970e+02,-5.9097744361e+02,4.9012889342e+01
-9.7744360902e+01,-5.9097744361e+02,4.8030232235e+01
-9.4736842105e+01,-5.9097744361e+02,4.7085179210e+01
-9.1729323308e+01,-5.9097744361e+02,4.6176984022e+01
-8.8721804511e+01,-5.9097744361e+02,4.5304927462e+01
-8.5714285714e+01,-5.9097744361e+02,4.4468317006e+01
-8.2706766917e+01,-5.9097744361e+02,4.3666486470e+01
-7.9699248120e+01,-5.9097744361e+02,4.2898795681e+01
-7.6691729323e+01,-5.9097744361e+02,4.2164630153e+01
-7.3684210526e+01,-5.9097744361e+02,4.1463400784e+01
-7.0676691729e+01,-5.9097744361e+02,4.0794543556e+01
-6.7669172932e+01,-5.9097744361e+02,4.0157519251e+01
-6.4661654135e+01,-5.9097744361e+02,3.9551813173e+01
-6.1654135338e+01,-5.9097744361e+02,3.8976934891e+01
-5.8646616541e+01,-5.9097744361e+02,3.8432417985e+01
-5.5639097744e+01,-5.9097744361e+02,3.7917819806e+01
-5.2631578947e+01,-5.9097744361e+02,3.7432721246e+01
-4.9624060150e+01,-5.9097744361e+02,3.6976726526e+01
-4.6616541353e+01,-5.9097744361e+02,3.6549462985e+01
-4.3609022556e+01,-5.9097744361e+02,3.6150580889e+01
-4.0601503759e+01,-5.9097744361e+02,3.5779753247e+01
-3.7593984962e+01,-5.9097744361e+02,3.5436675641e+01
-3.4586466165e+01,-5.9097744361e+02,3.5121066065e+01
-3.1578947368e+01,-5.9097744361e+02,3.4832664776e+01
-2.8571428571e+01,-5.9097744361e+02,3.4571234159e+01
-2.5563909774e+01,-5.9097744361e+02,3.4336558598e+01
-2.2556390977e+01,-5.9097744361e+02,3.4128444367e+01
-1.9548872180e+01,-5.9097744361e+02,3.3946719522e+01
-1.6541353383e+01,-5.9097744361e+02,3.3791233812e+01
-1.3533834586e+01,-5.9097744361e+02,3.3661858600e+01
-1.0526315789e+01,-5.9097744361e+02,3.3558486791e+01
-7.5187969925e+00,-5.9097744361e+02,3.3481032781e+01
-4.5112781955e+00,-5.9097744361e+02,3.3429432403e+01
-1.5037593985e+00,-5.9097744361e+02,3.3403642900e+01
1.5037593985e+00,-5.9097744361e+02,3.3403642900e+01
4.5112781955e+00,-5.9097744361e+02,3.3429432403e+01
7.5187969925e+00,-5.9097744361e+02,3.3481032781e+01
1.0526315789e+01,-5.9097744361e+02,3.3558486791e+01
1.3533834586e+01,-5.9097744361e+02,3.3661858600e+01
1.6541353383e+01,-5.9097744361e+02,3.3791233812e+01
1.9548872180e+01,-5.9097744361e+02,3.3946719522e+01
2.2556390977e+01,-5.9097744361e+02,3.4128444367e+01
2.5563909774e+01,-5.9097744361e+02,3.4336558598e+01
2.8571428571e+01,-5.9097744361e+02,3.4571234159e+01
3.1578947368e+01,-5.9097744361e+02,3.4832664776e+01
3.4586466165e+01,-5.9097744361e+02,3.5121066065e+01
3.7593984962e+01,-5.9097744361e+02,3.5436675641e+01
4.0601503759e+01,-5.9097744361e+02,3.5779753247e+01
4.3609022556e+01,-5.9097744361e+02,3.6150580889e+01
4.6616541353e+01,-5.9097744361e+02,3.6549462985e+01
4.9624060150e+01,-5.9097744361e+02,3.6976726526e+01
5.2631578947e+01,-5.9097744361e+02,3.7432721246e+01
5.5639097744e+01,-5.9097744361e+02,3.7917819806e+01
5.8646616541e+01,-5.9097744361e+02,3.8432417985e+01
6.1654135338e+01,-5.9097744361e+02,3.8976934891e+01
6.4661654135e+01,-5.9097744361e+02,3.9551813173e+01
6.7669172932e+01,-5.9097744361e+02,4.0157519251e+01
7.0676691729e+01,-5.9097744361e+02,4.0794543556e+01
7.3684210526e+01,-5.9097744361e+02,4.1463400784e+01
7.6691729323e+01,-5.9097744361e+02,4.2164630153e+01
7.9699248120e+01,-5.9097744361e+02,4.2898795681e+01
8.2706766917e+01,-5.9097744361e+02,4.3666486470e+01
8.5714285714e+01,-5.9097744361e+02,4.4468317006e+01
8.8721804511e+01,-5.9097744361e+02,4.5304927462e+01
9.1729323308e+01,-5.9097744361e+02,4.6176984022e+01
9.4736842105e+01,-5.9097744361e+02,4.7085179210e+01
9.7744360902e+01,-5.9097744361e+02,4.8030232235e+01
1.0075187970e+02,-5.9097744361e+02,4.9012889342e+01
-1.1879699248e+02,-5.8796992481e+02,4.9702632418e+01
-1.1578947368e+02,-5.8796992481e+02,4.8535424364e+01
-1.1278195489e+02,-5.8796992481e+02,4.7409173567e+01
-1.0977443609e+02,-5.8796992481e+02,4.6322980495e+01
-1.0676691729e+02,-5.8796992481e+02,4.5275974569e+01
-1.0375939850e+02,-5.8796992481e+02,4.4267313741e+01
-1.0075187970e+02,-5.8796992481e+02,4.3296184084e+01
-9.7744360902e+01,-5.8796992481e+02,4.2361799390e+01
-9.4736842105e+01,-5.8796992481e+02,4.1463400784e+01
-9.1729323308e+01,-5.8796992481e+02,4.0600256346e+01
-8.8721804511e+01,-5.8796992481e+02,3.9771660747e+01
-8.5714285714e+01,-5.8796992481e+02,3.8976934891e+01
-8.2706766917e+01,-5.8796992481e+02,3.8215425578e+01
-7.9699248120e+01,-5.8796992481e+02,3.7486505168e+01
-7.6691729323e+01,-5.8796992481e+02,3.6789571264e+01
-7.3684210526e+01,-5.8796992481e+02,3.6124046404e+01
-7.0676691729e+01,-5.8796992481e+02,3.5489377760e+01
-6.7669172932e+01,-5.8796992481e+02,3.4885036857e+01
-6.4661654135e+01,-5.8796992481e+02,3.4310519300e+01
-6.1654135338e+01,-5.8796992481e+02,3.3765344503e+01
-5.8646616541e+01,-5.8796992481e+02,3.3249055449e+01
-5.5639097744e+01,-5.8796992481e+02,3.2761218441e+01
-5.2631578947e+01,-5.8796992481e+02,3.2301422878e+01
-4.9624060150e+01,-5.8796992481e+02,3.1869281038e+01
-4.6616541353e+01,-5.8796992481e+02,3.1464427872e+01
-4.3609022556e+01,-5.8796992481e+02,3.1086520807e+01
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-3.7593984962e+01,-5.8796992481e+02,3.0410286006e+01
-3.4586466165e+01,-5.8796992481e+02,3.0111383932e+01
-3.1578947368e+01,-5.8796992481e+02,2.9838278976e+01
-2.8571428571e+01,-5.8796992481e+02,2.9590738448e+01
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-1.9548872180e+01,-5.8796992481e+02,2.8999499142e+01
-1.6541353383e+01,-5.8796992481e+02,2.8852318834e+01
-1.3533834586e+01,-5.8796992481e+02,2.8729860687e+01
-1.0526315789e+01,-5.8796992481e+02,2.8632019844e+01
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4.5112781955e+00,-5.8796992481e+02,2.8509875806e+01
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1.0526315789e+01,-5.8796992481e+02,2.8632019844e+01
1.3533834586e+01,-5.8796992481e+02,2.8729860687e+01
1.6541353383e+01,-5.8796992481e+02,2.8852318834e+01
1.9548872180e+01,-5.8796992481e+02,2.8999499142e+01
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2.8571428571e+01,-5.8796992481e+02,2.9590738448e+01
3.1578947368e+01,-5.8796992481e+02,2.9838278976e+01
3.4586466165e+01,-5.8796992481e+02,3.0111383932e+01
3.7593984962e+01,-5.8796992481e+02,3.0410286006e+01
4.0601503759e+01,-5.8796992481e+02,3.0735239569e+01
4.3609022556e+01,-5.8796992481e+02,3.1086520807e+01
4.6616541353e+01,-5.8796992481e+02,3.1464427872e+01
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6.1654135338e+01,-5.8796992481e+02,3.3765344503e+01
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6.7669172932e+01,-5.8796992481e+02,3.4885036857e+01
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7.6691729323e+01,-5.8796992481e+02,3.6789571264e+01
7.9699248120e+01,-5.8796992481e+02,3.7486505168e+01
8.2706766917e+01,-5.8796992481e+02,3.8215425578e+01
8.5714285714e+01,-5.8796992481e+02,3.8976934891e+01
8.8721804511e+01,-5.8796992481e+02,3.9771660747e+01
9.1729323308e+01,-5.8796992481e+02,4.0600256346e+01
9.4736842105e+01,-5.8796992481e+02,4.1463400784e+01
9.7744360902e+01,-5.8796992481e+02,4.2361799390e+01
1.0075187970e+02,-5.8796992481e+02,4.3296184084e+01
1.0375939850e+02,-5.8796992481e+02,4.4267313741e+01
1.0676691729e+02,-5.8796992481e+02,4.5275974569e+01
1.0977443609e+02,-5.8796992481e+02,4.6322980495e+01
1.1278195489e+02,-5.8796992481e+02,4.7409173567e+01
1.1578947368e+02,-5.8796992481e+02,4.8535424364e+01
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