docs: scaffold polisher-control foundation

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Nick Hermes
2026-05-26 16:23:04 +00:00
commit fa9c43fae8
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{
"schema_version": "job.v1",
"job_id": "job-2026-07-001",
"mirror_id": "gigabit-m1",
"machine_family": "swing-arm",
"source_map_id": "ifg-2026-07-14-pre",
"target_id": "target-m1-final-figure",
"created_at": "2026-07-15T09:30:00Z",
"created_by": "antoine",
"planner_version": "polisher-sim/0.6.0",
"calibration_state_ref": "cal-2026-06-fullum-alpha",
"strategy_summary": {
"intent": "Reduce dominant astigmatism using m=2 force modulation on 280mm tool",
"confidence": 0.72,
"notes": "Single-pass conservative correction. Dither disabled for baseline comparison."
},
"passes": [
{
"pass_id": "pass-01",
"sequence_index": 1,
"objective": "Astigmatism reduction via force modulation",
"preset_name": "figuring_standard",
"duration_s": 1200,
"force_n": 45.0,
"table_rpm": 4.0,
"spindle_rpm": 40.0,
"motion_family": "swing-arm-rosette",
"motion_params": {
"cam_amplitude_deg": 31.3,
"cam_offset_deg": 0.0,
"osc_hz": 0.25
},
"dither_profile": "none",
"force_modulation": {
"harmonic": 2,
"amplitude_n": 5.0,
"phase_deg": 37.2
},
"notes": "Phase derived from Zernike fit of pre-polish interferogram."
}
],
"predicted_outcome": {
"removal_rms_nm": 18.5,
"removal_pv_nm": 62.0,
"residual_zernikes": {
"Z4": -2.1,
"Z5": 12.3,
"Z6": -8.7,
"Z7": 15.1,
"Z8": -3.2,
"Z9": 4.5,
"Z10": -2.8
}
},
"uncertainty": {
"removal_rms_nm_range": [14.0, 24.0],
"notes": "Uncertainty dominated by Preston coefficient calibration spread."
},
"attachments": [
{
"filename": "predicted_removal.csv",
"role": "predicted_removal_map",
"description": "2D removal map in nm, 256x256 grid"
},
{
"filename": "pre_surface.csv",
"role": "input_surface_map",
"description": "Pre-polish surface map used as planning input"
}
]
}