Antoine
4146e9d8f1
- Output now matches WFE_from_CSV_OPD format: ,X,Y,Z,DX,DY,DZ (meters) - Suite regenerated using real M2 mesh (357 nodes, 308mm diameter) - All 14 clean test cases: PASS (0.000 nm error) - 3 noisy cases: expected FAIL due to low node count amplifying noise - Added --inject mode to use real FEA mesh geometry - Added lateral displacement test case
47 KiB
47 KiB
| 1 | X | Y | Z | DX | DY | DZ | |
|---|---|---|---|---|---|---|---|
| 2 | 0 | 2.3213457927954585e-07 | 7.0192473936117050e-03 | 9.0794787554182577e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 5.3388119941801166e-12 |
| 3 | 1 | 2.5977121345781744e-03 | 1.1517149682457123e-02 | 9.0794787554182577e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.4998731946249636e-12 |
| 4 | 2 | -2.5972378654218259e-03 | 1.1517149682457123e-02 | 9.0794787554182577e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.9967844551845238e-12 |
| 5 | 3 | -4.5013965421825583e-05 | -7.9734726944255263e-03 | 8.5744833477516824e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.4992374828733045e-11 |
| 6 | 4 | 1.1570132134578174e-02 | -3.7689960772034903e-03 | 8.7319678715387372e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.1683134727890734e-11 |
| 7 | 5 | 1.7727132134578175e-02 | 6.8948193904984079e-03 | 8.8090371313267468e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 5.7603500212802049e-12 |
| 8 | 6 | 1.5588132134578174e-02 | 1.9017250359090548e-02 | 8.9065225749496157e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -8.5450359388305693e-13 |
| 9 | 7 | 6.1562021345781745e-03 | 2.6933356070924563e-02 | 8.9632178928165107e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -7.0925598317609051e-12 |
| 10 | 8 | -6.1557378654218259e-03 | 2.6933356070924563e-02 | 8.9632178928165107e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -9.8808524957731847e-12 |
| 11 | 9 | -1.5587667865421826e-02 | 1.9017250359090548e-02 | 8.9065225749496157e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -5.8397405563698649e-12 |
| 12 | 10 | -1.7726667865421826e-02 | 6.8948193904984079e-03 | 8.8090371313267468e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.7049295705528822e-12 |
| 13 | 11 | -1.1569667865421825e-02 | -3.7689960772034903e-03 | 8.7319678715387372e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.2416507243676035e-11 |
| 14 | 12 | -9.7860654218255844e-06 | -2.2970577048445823e-02 | 7.8864448352931049e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.3099005206907495e-11 |
| 15 | 13 | 1.3421332134578074e-02 | -2.0119364599521683e-02 | 7.9240290221305187e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.8854498493880570e-11 |
| 16 | 14 | 2.4522732134578173e-02 | -1.2053674713378509e-02 | 7.9830854406433005e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.3137792156591781e-11 |
| 17 | 15 | 3.1383232134578179e-02 | -1.7282747209296234e-04 | 8.0759553993876576e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 7.6778036839933830e-12 |
| 18 | 16 | 3.2817232134578177e-02 | 1.3474658857753063e-02 | 8.1759197763628944e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.6679271168086900e-12 |
| 19 | 17 | 2.8577432134578175e-02 | 2.6523129284856700e-02 | 8.2768579406105047e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.7652419771172378e-12 |
| 20 | 18 | 1.9396032134578176e-02 | 3.6719708057530331e-02 | 8.3506301078768441e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -9.2659532356526742e-12 |
| 21 | 19 | 6.8607921345781742e-03 | 4.2301504501233184e-02 | 8.3915380663392991e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.6086445379525757e-11 |
| 22 | 20 | -6.8603578654218254e-03 | 4.2301504501233184e-02 | 8.3915380663392991e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.0966993805735741e-11 |
| 23 | 21 | -1.9395567865421827e-02 | 3.6719708057530331e-02 | 8.3506301078768441e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.1243255200949682e-11 |
| 24 | 22 | -2.8576967865421826e-02 | 2.6523129284856700e-02 | 8.2768579406105047e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.5511888361624979e-11 |
| 25 | 23 | -3.2816767865421821e-02 | 1.3474658857753063e-02 | 8.1759197763628944e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.7685309315615983e-12 |
| 26 | 24 | -3.1382767865421823e-02 | -1.7282747209296234e-04 | 8.0759553993876576e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 7.7690849417001694e-12 |
| 27 | 25 | -2.4522267865421825e-02 | -1.2053674713378509e-02 | 7.9830854406433005e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.8108776600161359e-11 |
| 28 | 26 | -1.3420967865421825e-02 | -2.0118427496016666e-02 | 7.9243780737328073e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.3395012760433849e-11 |
| 29 | 27 | -8.4423554218255850e-06 | -3.7952721095265290e-02 | 6.6597485565225156e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.8962510398443880e-11 |
| 30 | 28 | 1.4146632134578174e-02 | -3.5829819265298962e-02 | 6.7675299107776699e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.3286337440361780e-11 |
| 31 | 29 | 2.7036432134578174e-02 | -2.9620214608197720e-02 | 6.8075174401749372e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.6741295569206754e-11 |
| 32 | 30 | 3.7524332134578176e-02 | -1.9892488839563377e-02 | 6.8880616531739047e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.0949419284147605e-11 |
| 33 | 31 | 4.4677632134578177e-02 | -7.5018139380177706e-03 | 6.9787505952192408e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 6.6858685486633242e-12 |
| 34 | 32 | 4.7861332134578174e-02 | 6.4448407404464891e-03 | 7.0834371734866952e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.7230898013139250e-12 |
| 35 | 33 | 4.6792532134578076e-02 | 2.0711959250144990e-02 | 7.1901068984361327e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.0590609057613267e-12 |
| 36 | 34 | 4.1565032134578177e-02 | 3.4031484920716878e-02 | 7.2852957159128540e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.5526531655314746e-12 |
| 37 | 35 | 3.2644932134578176e-02 | 4.5213819878222580e-02 | 7.3740926648797611e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -7.9752808701215909e-12 |
| 38 | 36 | 2.0824032134578174e-02 | 5.3273887143335807e-02 | 7.4310547737799215e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.5205438744299330e-11 |
| 39 | 37 | 7.1534421345780747e-03 | 5.7489325537144878e-02 | 7.4645681740987957e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.3200213099292943e-11 |
| 40 | 38 | -7.1530578654218253e-03 | 5.7489325537144878e-02 | 7.4645681740987957e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.0116027242555576e-11 |
| 41 | 39 | -2.0823667865421825e-02 | 5.3273887143335807e-02 | 7.4310547737799215e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.3861847420439652e-11 |
| 42 | 40 | -3.2644567865421720e-02 | 4.5214756981727500e-02 | 7.3744417164818277e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.2798043722680773e-11 |
| 43 | 41 | -4.1564467865421825e-02 | 3.4031484920716878e-02 | 7.2852957159128540e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.6340664548290134e-11 |
| 44 | 42 | -4.6791867865421721e-02 | 2.0711959250144990e-02 | 7.1901068984361327e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.5239351467785055e-11 |
| 45 | 43 | -4.7860767865421719e-02 | 6.4448407404464891e-03 | 7.0834371734866952e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.4641812688851774e-12 |
| 46 | 44 | -4.4677067865421825e-02 | -7.5027510415228149e-03 | 6.9784015436171742e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.2323293686301717e-11 |
| 47 | 45 | -3.7523867865421820e-02 | -1.9892488839563377e-02 | 6.8880616531739047e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.3502649045030879e-11 |
| 48 | 46 | -2.7035967865421826e-02 | -2.9623705124218663e-02 | 6.8168884752246584e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.0210987048546570e-11 |
| 49 | 47 | -1.4146367865421726e-02 | -3.5829819265298962e-02 | 6.7675299107776699e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.1810417705298418e-11 |
| 50 | 48 | -9.6070654218255849e-06 | -5.2943092310579004e-02 | 5.2058930523204427e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.2027208781600384e-11 |
| 51 | 49 | 1.4527432134578175e-02 | -5.1249874114423916e-02 | 5.2496667911337003e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.4719489902189152e-11 |
| 52 | 50 | 2.8270832134578174e-02 | -4.6248609401362606e-02 | 5.2877623274518726e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.6940968892670419e-11 |
| 53 | 51 | 4.0491532134578179e-02 | -3.8211711825875322e-02 | 5.3467653877583565e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.0122914814866897e-11 |
| 54 | 52 | 5.0528332134578177e-02 | -2.7572940254809331e-02 | 5.4251774957481125e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 5.2337644050515898e-12 |
| 55 | 53 | 5.7841532134578176e-02 | -1.4907203797776408e-02 | 5.5222805388897012e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.5905382692509932e-12 |
| 56 | 54 | 6.2036132134578176e-02 | -8.9385136094941031e-04 | 5.6197971081330955e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.8339584961834451e-12 |
| 57 | 55 | 6.2886032134578176e-02 | 1.3705913325547964e-02 | 5.7329876505918254e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.0523234915097724e-12 |
| 58 | 56 | 6.0346332134578178e-02 | 2.8110433663990547e-02 | 5.8374808053598404e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.0347282822277103e-12 |
| 59 | 57 | 5.4554032134578177e-02 | 4.1538826750650043e-02 | 5.9412069359068287e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 5.9105055182715423e-13 |
| 60 | 58 | 4.5820032134578179e-02 | 5.3269152714121498e-02 | 6.0313667424030104e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.1312738913844285e-12 |
| 61 | 59 | 3.4615332134578077e-02 | 6.2672408339502758e-02 | 6.0977643608532972e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -9.4025745412797337e-12 |
| 62 | 60 | 2.1544832134578175e-02 | 6.9234338347007818e-02 | 6.1516027914036986e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.7795699187611586e-11 |
| 63 | 61 | 7.3134721345781747e-03 | 7.2609856316273855e-02 | 6.1710563042591815e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.7229231035399945e-11 |
| 64 | 62 | -7.3127478654217261e-03 | 7.2607302903757831e-02 | 6.1807763909109692e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.6158549507551953e-11 |
| 65 | 63 | -2.1544167865421824e-02 | 6.9235275450512848e-02 | 6.1519518430057651e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.2880921453299325e-11 |
| 66 | 64 | -3.4614667865421819e-02 | 6.2673345443007678e-02 | 6.0981134124553638e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.5886403582077983e-11 |
| 67 | 65 | -4.5819467865421820e-02 | 5.3270089817626418e-02 | 6.0317157940050770e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.4178981063723477e-11 |
| 68 | 66 | -5.4553467865421819e-02 | 4.1539763854154962e-02 | 5.9415559875088952e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.7519136708951612e-11 |
| 69 | 67 | -6.0345867865421822e-02 | 2.8110433663990547e-02 | 5.8374808053598404e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.6493111988140941e-11 |
| 70 | 68 | -6.2885567865421835e-02 | 1.3706850429052980e-02 | 5.7333367021938919e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.2443413978383233e-11 |
| 71 | 69 | -6.2035667865421820e-02 | -8.9385136094941031e-04 | 5.6197971081330955e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.7665847777523115e-12 |
| 72 | 70 | -5.7841167865421823e-02 | -1.4907203797776408e-02 | 5.5222805388897012e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.7091276654389173e-11 |
| 73 | 71 | -5.0527967865421720e-02 | -2.7572940254809331e-02 | 5.4251774957481125e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.8663694795598725e-11 |
| 74 | 72 | -4.0491167865421819e-02 | -3.8211711825875322e-02 | 5.3467653877583565e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.6143253671710047e-11 |
| 75 | 73 | -2.8270567865421824e-02 | -4.6248609401362606e-02 | 5.2877623274518726e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.8929127933269759e-11 |
| 76 | 74 | -1.4527167865421825e-02 | -5.1250811217928932e-02 | 5.2493177395316337e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.7240494673819071e-11 |
| 77 | 75 | -1.4021565421825585e-05 | -6.7923515555232711e-02 | 3.2755398693415927e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.1855064250022191e-11 |
| 78 | 76 | 1.4330632134578074e-02 | -6.6607056321628472e-02 | 3.3710599523513185e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.3095119821560838e-11 |
| 79 | 77 | 2.8174332134578175e-02 | -6.2667616586811803e-02 | 3.3978101999720955e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.4144429547040300e-11 |
| 80 | 78 | 4.1058032134578176e-02 | -5.6250843134089845e-02 | 3.4402655464282894e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 6.1580316024658035e-12 |
| 81 | 79 | 5.2543032134578178e-02 | -4.7579319722670266e-02 | 3.5115587803422610e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 5.6567281914507442e-14 |
| 82 | 80 | 6.2239332134578176e-02 | -3.6941485255109374e-02 | 3.5896218367301724e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.5971067023428771e-12 |
| 83 | 81 | 6.9816132134578171e-02 | -2.4707633457913880e-02 | 3.6859245067712987e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.6708249981185330e-12 |
| 84 | 82 | 7.5014532134578177e-02 | -1.1285120890283495e-02 | 3.7767890862472342e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.4606541268764945e-12 |
| 85 | 83 | 7.7659232134578177e-02 | 2.8595894467506877e-03 | 3.8912202070116031e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -6.4684512303345183e-13 |
| 86 | 84 | 7.7659332134578166e-02 | 1.7253801646638450e-02 | 3.9918737941566640e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.8276620038420181e-12 |
| 87 | 85 | 7.5014832134578172e-02 | 3.1398511983672509e-02 | 4.1063049149210329e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 5.8930807561391469e-12 |
| 88 | 86 | 6.9816432134578166e-02 | 4.4817534035282006e-02 | 4.2065405294469116e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 7.5261944689343524e-12 |
| 89 | 87 | 6.2239032134578175e-02 | 5.7055813452003459e-02 | 4.2938212160403832e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 6.9036774895517138e-12 |
| 90 | 88 | 5.2542832134578180e-02 | 6.7691773712554373e-02 | 4.3711861692237175e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.5358024614807492e-12 |
| 91 | 89 | 4.1057932134578076e-02 | 7.6363297123973994e-02 | 4.4424794031376891e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.6474735557172840e-12 |
| 92 | 90 | 2.8174332134578175e-02 | 8.2781007680200927e-02 | 4.4852838011961715e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.1268645888654112e-11 |
| 93 | 91 | 1.4331032134578174e-02 | 8.6716956898996708e-02 | 4.5214050838666697e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -2.1542783378046563e-11 |
| 94 | 92 | 1.4483434578174416e-05 | 8.8037723696161696e-02 | 4.4477907679620898e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.2351794726805998e-11 |
| 95 | 93 | -1.4330167865421725e-02 | 8.6716019795491692e-02 | 4.5210560322643811e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.2441636411358759e-11 |
| 96 | 94 | -2.8173867865421826e-02 | 8.2780070576696008e-02 | 4.4849347495941050e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -5.0490878950978829e-11 |
| 97 | 95 | -4.1057567865421821e-02 | 7.6365850536489921e-02 | 4.4327593164856793e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -5.5375346451235272e-11 |
| 98 | 96 | -5.2542567865421823e-02 | 6.7692710816059404e-02 | 4.3715352208260061e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -5.6278475897813174e-11 |
| 99 | 97 | -6.2238967865421720e-02 | 5.7056750555508379e-02 | 4.2941702676424498e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -5.2816359022621868e-11 |
| 100 | 98 | -6.9815767865421832e-02 | 4.4818471138786925e-02 | 4.2068895810489781e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.5095337306230536e-11 |
| 101 | 99 | -7.5014067865421835e-02 | 3.1401065396188491e-02 | 4.0965848282688011e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -3.3719639232455678e-11 |
| 102 | 100 | -7.7658767865421835e-02 | 1.7252864543133434e-02 | 3.9915247425543754e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -1.9704841928811270e-11 |
| 103 | 101 | -7.7658867865421824e-02 | 2.8595894467506877e-03 | 3.8912202070116031e-03 | 0.00000e+00 | 0.0000000000000000e+00 | -4.3814174042638021e-12 |
| 104 | 102 | -7.5014367865421830e-02 | -1.1287674302799366e-02 | 3.7865091728994660e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 1.0778466946344858e-11 |
| 105 | 103 | -6.9815867865421835e-02 | -2.4707633457913880e-02 | 3.6859245067712987e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 2.4338654178110292e-11 |
| 106 | 104 | -6.2238467865421823e-02 | -3.6942422358614391e-02 | 3.5892727851278838e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 3.5069860298623534e-11 |
| 107 | 105 | -5.2542367865421824e-02 | -4.7579319722670266e-02 | 3.5115587803422610e-03 | 0.00000e+00 | 0.0000000000000000e+00 | 4.2098781199637006e-11 |
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